微机电系统压力传感器抗干扰系统设计
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TP212;TP391

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国家自然科学基金项目(41605120)


Design of Anti-Jamming System Based on MEMS Pressure Sensor
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The National Natural Science Foundation of China(41605120)

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    摘要:

    鉴于传统的硅基MEMS压阻式压力传感器普遍存在温度漂移和时间漂移误差,本文采用恒温控制和恒流源自校正方法针对上述问题设计和研究了一种MEMS压力传感器抗干扰系统。首先,简单介绍了传感器的各项参数和温漂、时漂原理。其次,设计并制作了传感器相关外部抗干扰电路。最后,对该系统进行实验测试。结果表明,抗干扰系统能减小传感器温漂和时漂误差,热零点漂移的绝对值由恒温前的0.0652%FS/℃降至恒温后的0.00788%FS/℃,热灵敏度漂移的绝对值由0.118%FS/℃降至0.0153%FS/℃,时漂补偿后预测误差由-3.436~0.875 kPa降低至-2.086~1.765 kPa。该设计对MEMS压力传感器温漂、时漂补偿等抗干扰方面的研究具有一定参考价值。

    Abstract:

    It is well known that the traditional silicon MEMS piezoresistive pressure sensors generally have temperature drift and time drift errors. In view of it, an anti-interference system for MEMS pressure sensors is designed by using the method of constant temperature control and constant current source correction. Firstly, the parameters of the sensor and the principles of temperature drift and time drift are briefly introduced. Secondly, an anti-interference circuit system related to sensor is designed and made. Finally, the system is tested experimentally. The results show that the temperature drift and time drift errors of the sensor could be reduced in the anti- interference system. The absolute value of thermal zero drift decreases from 0.0652%FS/℃ to 0.00788%FS/℃ after constant temperature, and the absolute value of thermal sensitivity drift decreases from 0.118%FS/℃ to 0.0153%FS/℃. As the same, the prediction error decreases from -3.436~0.875 kPa to -2.086~1.765 kPa after time drift compensation. The design of anti-interference system has a certain reference value for temperature drift, time drift compensation of MEMS pressure sensor.

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冒晓莉,吴其宇,谢晓璐,等. 微机电系统压力传感器抗干扰系统设计[J]. 科学技术与工程, 2021, 21(36): 15503-15508.
Mao Xiaoli, Wu Qiyu, Xie Xiaolu, et al. Design of Anti-Jamming System Based on MEMS Pressure Sensor[J]. Science Technology and Engineering,2021,21(36):15503-15508.

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  • 收稿日期:2021-05-17
  • 最后修改日期:2021-10-12
  • 录用日期:2021-08-31
  • 在线发布日期: 2022-01-04
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