Abstract:Based on a novel resonant sensitive micro structure, whose preliminary sensing component is an E-type round diaphragm and the final sensing component is a pair of beam resonators which are located at the inner and outer edges of the E-type round diaphragm, respectively. The unique advantage of this sensing structure is that the differential measuring mechanism can be realized and some measurands, such as absolute pressure, differential pressure, concentrated force and the acceleration. The relationship between the natural frequencies of the beam resonators and the measurands are presented.