Introduces the basic principle of High-field Asymmetric Waveform Ion Mobility Spectrometry (FAIMS) technology, Analyses the linear relationship between dispel voltage and disperse voltage in theory. The temperature nonlinear errors of the disperse voltage is studied experimentally under the condition of the determination of the dispel voltage. The temperature drift errors compensation model of the disperse voltage is established by using the quadric surface equation. The results show that this temperature compensation model has an ideal compensation effect on the temperature drift of the disperse voltage in the range of 22.8℃~27.8℃, and can achieve the unique characteristics of the specific material ion under different temperature conditions. Besides, this compensation method also provides an ideal solution for the design of no constant temperature control system, which reduces the design of the structure of the drift tube.