This paper describes the principle of Rymaszewski’s formulas for four-point probe method to measure thin-film resistance. Design and build a four-point probe method system that can measure thin-film resistance at the temperature from normal atmospheric temperature to 550℃.This system can measure thin-film resistance at a changing temperature within protective gas, and makes up the weak point of four-point probe method at a high temperature. This paper prepares poly-silicon film and platinum film, and tests their resistance-temperature characteristics. It matches the temperature coefficient of resistance by polynomial. At last it analysis the reliability of the new method.