Aiming at heat generation of thread meshing and bearing rotation, thermal boundary conditions of hollow planetary roller screw are calculated. The equivalent thermal model of hollow planetary roller screw is established based on finite element method and the temperature distribution of screw in without cooling, water cooling and oil cooling is analyzed, furthermore, the influence of different coolant flows and screw rotate speeds on thermal deformation of screw are investigated. The results showed that water cooling is better than oil cooling and heat generations of assembly position of bearing are severe in three conditions mentioned above. At the same time, increment of the coolant flow can observably decreases the screw temperature rise, which furthermore reduces thermal deformation of the screw. Besides, the screw temperature rise and thermal deformation of the screw increases with the screw speed increases. The research results can be used as a guide for choice of cooling, temperature control and thermal error forecast.