Abstract:To improve the power efficiency used to generate the plasma by DBD (dielectric barrier discharge) technology in near vacuum condition, and to study power energy-efficiency characteristics, the influencing factors, such as the frequency and duty ratio of the plasma power, the air pressure in the DBD discharge container and the distance between electrodes, to the discharge efficiency has been researched through the orthogonal experiment method. The best combination of the factors may been found by variance analysis method to obtain maximize the power efficiency. The experiment results show that duty ratio is the primary factor affecting the power efficiency, the influence caused by air pressure is secondary, the frequency of the power and electrode distance have a little prominent effect to the power efficiency.